High-performance actuation is always desirable ina dexterous high-precision manipulation system. In this paper, wefirst develop a single-degree-of-freedom piezoelectric translatorcomposed of a piezoelectric stack, a monolithic leaf spring and apreload mechanism. The displacement resolution reached by thistranslator is better than 10 nm, while its natural frequency is over2 kHz. Based on the developed piezoelectric translator, a micro-manipulator is then designed, which is capable of producingmicro-motions in six degrees of freedom. The designcharacteristics and kinematics of this micro-manipulator areinvestigated. An effective kinematic model used for the real-timecontrol is presented, and the operation performance of the micro-manipulator is discussed further.
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