Finite element analysis of self-positioning microstructures and nanostructures

摘要

The finite element method is used for modelling of self-positioning microstructures and nanostructures. The geometrically nonlinear problem with large rotations and large displacements is solved using a step procedure with coordinate updating after each step. It is shown that the real shape of the self-positioning structures is rather complicated and the analytical formulae have limited applicability in the estimation of such parameters as the curvature radius and/or angle of elevation.