Low-temperature fabrication of single-crystal ZnO nanopillar photonic bandgap structures

摘要

We describe the fabrication of single-crystal nanopillars of ZnO in two-dimensional periodic and aperiodic arrays for photonic applications. The structures are denned by a thin polymer template created by e-beam lithography and are grown at 90 deg C using an electro6hemical process. The individual single-crystal ZnO pillars have diameters of approx 120 nm and lengths greater than 1 mu m. Visible light diffraction patterns from the ordered arrays were observed, and the in-plane photonic bandgap was characterized.