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Process intensification by CO_2 for high quality carbon nanotube forest growth: Double-walled carbon nanotube convexity or single-walled carbon nanotube bowls?

机译:通过CO_2强化过程以实现高质量的碳纳米管森林生长:双壁碳纳米管凸度还是单壁碳纳米管碗?

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摘要

Introduction of CO_2 is a facile way to tune the growth of vertically aligned double- or single-walled carbon nanotube (CNT) forests on wafers. In the absence of CO_2, a double-walled CNT convexity was obtained. With increasing concentration of CO_2, the morphologies of the forests transformed first into radial blocks, and finally into bowl-shaped forests. Furthermore, the wall number and diameter distribution of the CNTs were also modulated by varying the amount of CO_2. With increasing CO_2 concentration, CNTs with fewer wall number and smaller diameter were obtained. The addition of CO_2 is speculated to generate water and serve as a weak oxidant for high quality CNT growth. It can tune the growth rate and the morphologies of the forests, prevent the formation of amorphous carbon, and reduce the wall number of the CNTs.
机译:引入CO_2是调整晶圆上垂直排列的双壁或单壁碳纳米管(CNT)林生长的简便方法。在不存在CO_2的情况下,获得了双壁CNT凸度。随着CO_2浓度的增加,森林的形态首先转变为放射状块,最后转变为碗状森林。此外,还通过改变CO 2的量来调节CNT的壁数和直径分布。随着CO_2浓度的增加,获得了壁数较少,直径较小的CNT。据推测,添加CO_2会产生水,并作为高质量CNT生长的弱氧化剂。它可以调节森林的生长速度和形态,防止形成无定形碳,并减少碳纳米管的壁数。

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