Quasi-two-dimensional electron gas at gamma-Al2O3/SrTiO3 heterointerfaces fabricated by spin coating method

摘要

Complex oxide heterointerfaces with the two-dimensional electron gas have drawn a lot of attention due to their emerging properties. However, most of them are prepared using the method with relatively high energy particles, which would inevitably lead to some defects. Here, a key challenge in the quasi-two-dimensional electron gas at spinel-type Al2O3/SrTiO3 heterointerfaces using a spin coating method is addressed. The grown Al2O3 films have the atomic-scale smooth surface and the thickness is about 70 nm. The gamma-Al2O3 layer with a thickness of about 3 nm in proximity to SrTiO3 and the amorphous Al2O3 layer on the top of.-Al2O3 are observed for the heterointerface annealed at 800 degrees C. The heterointerfaces at annealed temperatures above 750 degrees C exhibit a metallic behavior, which is attributed to the dominant layer of.-Al2O3. The sheet carrier density is about 3.1 x 10(15) cm-2 and the Hall mobility is 4924.4 cm(2) V-1 s(-1) at 15 K at the heterointerface annealed at 800 degrees C. Our work provides a low-cost way for the large-scale and large-area production of two-dimensional electron gas at high-quality oxide interfaces. Published by AIP Publishing.