Highly sensitive straightness measurement system using a ball-lens

摘要

In this paper, a new and simple optical technique to accurately measure the straightness errors of a linear stage is proposed. To improve the performance, including the measurement sensitivity and resolution of the measurement system, and to simultaneously measure two-dimensional straightness errors (2D straightness errors), an optical system was designed using a laser, a retro-reflector, a ball-lens, and a two-dimensional position sensitive detector (2D PSD). The characteristics of the measurement system were analytically and experimentally investigated. A prototype measurement system was manufactured based on the investigated results, and the performances of this system have been tested. The measuring performance of the system was easily improved by about 12 times using the proposed technique and it can be further improved. It is shown that the proposed technique can easily and effectively improve the performance of a conventional straightness measurement system based on the geometric optical method using a PSD.