A novel approach to correction of optical aberrations in laser scanning microscopy for surface metrology

摘要

In this paper, we present the design and construction of a laser scanning microscope for surface metrology. The proposed system is designed for using simple uncompensated optics in order to reduce the overall costs and the weight of the movable focusing optics, therefore improving measurement speed and system dynamics and offering the possibility of system miniaturization. In order to overcome the effects of optical aberrations in the system caused by the use of simple optics, a new approach is proposed, where the effects of these aberrations in the measurements are computationally corrected.