Interferometric 30 m bench for calibrations of 1D scales and optical distance measuring instruments

摘要

During construction of a new metrology building for MIKES, a 30 m interferometric bench was designed. The objective was to implement a straight, stable, adjustable and multifunctional 30 m measuring bench for calibrations. Special attention was paid to eliminating the effects of thermal expansion and inevitable concrete shrinkage. The linear guide, situated on top of a monolithic concrete beam, comprises two parallel round shafts with adjustable fixtures every 1 m. A carriage is moved along the rail and its position is followed by a reference interferometer. Depending on the measurement task, one or two retro-reflectors are fixed on the carriage. A microscope with a CCD camera and a monitor can be used to detect line mark positions on different line standards. When calibrating optical distance measuring instruments, various targets can be fixed to the carriage. For the most accurate measurements an online Abbe-error correction based on simultaneous carriage pitch measurement by a separate laser interferometer is applied. The bench is used for calibrations of machinist scales, tapes, circometers, electronic distance meters, total stations and laser trackers. The estimated expanded uncertainty for 30 m displacement for highest accuracy calibrations is 2.6 μm.