The geometric dynamic errors of CMMs in fast scanning-probing

摘要

Quasi-stiffness model is effective for the compensation of the geometric errors of coordinates measuring machines (CMMs) in slow probing, but degrade the error compensation accuracy due to the generation of dynamic errors in fast probing. It is usually regarded that acceleration is the major origin of dynamic errors; and yet the dynamic effects that rise from the quick fluctuation of geometric errors in fast probing had attracted little attentions. This paper presents a model for the dynamic effects of the geometric errors of CMMs in fast probing, and investigates their properties with experiments. The error model is built with recursive least squares (RLS) identification technique by taking probing acceleration and the 6 geometric errors of X slideway for the inputs while the positioning error of probe tip for output. Then the positioning error of probe tip is decomposed into 7 components corresponding to the 7 inputs. Analyses on the experiments show that the angular errors around Y and Z axes, (epsilon)_(Y)(x) and (epsilon)_(Z)(x), can induce remarkable dynamic effects, especially in a CMM with low stiffness air bearing. Error compensation with RLS identification seems feasible theoretically, but it is not recommendable due to the veracity uncertainty of identification. Nevertheless smoothening the sharp corners of the curves of geometric errors, especially (epsilon)_(Y) approx x and (epsilon)_(Z) approx x, in terms of probing speed and Y coordinates of probe tip is considered as a simple but effective and reliable method to improve the accuracy of CMMs errors compensation in fast probing.