Precision optical displacement sensor based on ultra-thin film photodiode type optical interferometers

摘要

The design and fabrication of our compact precision optical displacement sensor (PODS) are based on the newly developed ultra-thin film photodiode with its active layer thinner than a half of the incident light wavelength. In this paper, a detailed description of the principle, design, fabrication process and performance of PODS for application in both smooth and rough surfaces will be given.