Determination of layer ordering using sliding-window Fourier transform of x-ray reflectivity data

摘要

X-ray reflectometry allows the determination of the thickness, density and roughness of thin layers on a substrate from several Angstroms to some hundred nanometres. The thickness is determined by simulation with trial-and-error methods after extracting initial values of the layer thicknesses from the result of a classical Fast Fourier Transform (FFT) of the reflectivity data However, the order information of the layers is lost during classical FFT. The order of the layers has then to be known a priori. In this paper, it will be shown that the order of the layers can be obtained by a sliding-window Fourier transform, the so-called Gabor representation. This joint time-frequency analysis allows the direct determination of the order of the layers and, therefore, the use of a more appropriate starting model for refining simulations. A simulated and a measured example show the interest of this method. [References: 6]