A Microfocus X-Ray Source for Improved EDS and XRF Analysis in the SEM

摘要

A microfocus X-ray source mounted on the analysis chamber of an SEM was used to excite X-ray fluorescence spectra and to detect chemical elements with concentrations below the detection limit of the electron excited X-ray spectra conventionally measured with SEM/EDS. An aluminium alloy and a hard material ceramics were analysed as representative examples. It is demonstrated that the combination of the three analytical methods: (1) SEM imaging for surface morphology characterisation; (2) electron-excited X-ray spectroscopy with its high spatial resolution for element analysis of inclusions or precipitates; and (3) X-ray fluorescence for the detection of elements with concentrations below 0.1 mass% considerably improves the performance of SEM/EDX analyses.