This paper presents the concept, design and fabrication of a gear pump based on recently introduced synchronous micro motors as an integrated driving system. The micro motor is fully integrated in the fluidic system consisting of the inlet, outlet and pump chamber. A preliminary test on the gear pump flow rate is successfully reported. The whole system is mainly realized by means of micro fabrication technologies like UV-depth lithography and copper electroplating. Polymer magnets with alternating axial magnetization were applied in the toothed rotors. The use of polymer magnets affords a miniaturization with maximum space filling and without limitation in shape. In first tests the temperature behavior and the functional capability were investigated.
展开▼
