Extreme aspect ratio NiFe gear wheels for the production of commercially available Micro Harmonic Drive(r) gears

摘要

In a close collaboration the team of Micromotion, micro resist technology, BESSY, and LSU-CAMD have successfully mastered the challenges of LIGA production of ultra-precision microparts for Micro Harmonic Drive gears. The complementary expertise ranging from design and application know-how to process research and technical support resulted in high quality LIGA microparts and superior Micro Harmonic Drive gears taking advantages of the free 2D design capability and material choice. It is also an excellent example that through contributions from partners with different background and expertise LIGA precision parts can be produced with high quality and yield and for a market competitive price.