Electromagnetic levitation micromotor with stator embedded (ELMSE): levitation and lateral stability characteristics analysis

摘要

The adhesion, friction, wear in micro system or MEMS is more significant than those in macro system. The levitation or suspension technique is one of the effective techniques to eliminate the adhesion, friction, wear caused by the surfaces contact. The electromagnetic levitation micromotor with stators embedded (ELMSE) is a kind electromagnetic eddy current levitation system, which has special structure including the double sided stator and the hollow annular rotor. Different from the electromagnetic eddy current levitation system with single sided stator, ELMSE has good stability in the vertical and lateral directions. Using the finite element method, the levitation characteristics and lateral stability characteristics are analyzed. The influence of structural parameters and electric parameters on the vertical stiffness and the lateral stiffness has been analyzed and optimized in the paper. The analysis result of the paper provides theoretical reference for the optimal design of ELMSE.