Frequency-dependent noise analysis and damping in MEMS

摘要

The paper presents a combined noise and damping analysis for MEMS structures, based on frequency-dependent behavioral models extracted from finite element simulations. The design of high sensitivity MEMS-based microsystems needs to consider the frequency noise shaping induced by damping phenomena on micro scale motion, for its contribution can be significant in the system level noise analysis. Frequency-dependent behavioral models for squeeze-film damping are generated from finite element analysis simulations. Unlike existing noise analysis reported in literature, based on frequency-independent damping assumption, the paper integrates the damping and noise aspects using the same frequency-dependent models. The results can be used for a noise-based optimization procedure applied to the design of resonating microsensors, as illustrated for the case of a MEMS-based gyroscope.