Modeling gas damping and spring phenomena in MEMS with frequency-dependent macro-models

摘要

In this paper, we present an efficient macromodel extraction technique for gas damping and spring effects for arbitrarily shaped MEMS devices. The technique applies an Arnoldi-based model-order-reduction algorithm to automatically generate low-order models in a matter of minutes from an FEM approximation of the linearized Reynolds equation. The low-order gas-damping model can be easily inserted into a system-level modeling package for transient and frequency analysis.