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Laser scanning path generation considering photopolymer solidification in micro-stereolithography

机译:考虑微立体光刻中光聚合物固化的激光扫描路径生成

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It is essential to automate the scanning path generation process to effectively implement the micro-stereolithography. However, a scanning path that is generated based only on a 3D CAD model introduces dimensional inaccuracies. In micro-stereolithography, the photopolymer solidification is affected by fabrication conditions, such as the optical properties (laser power, laser scanning speed, laser scanning pitch focusing condition, etc.) and material properties of the photopolymer. Thus, the photopolymer solidification phenomena must be considered when generating a laser scanning path. In this paper, a scanning path generation algorithm that uses 3D CAD data and considers the photopolymer solidification phenomena is proposed to improve the dimensional accuracy in micro-stereolithography. Multi-line photo-polymer solidification experiments were performed for various laser scannin g conditions to examine the photo-polymer solidification phenomena. From these experiments, linear relations between the solidification length (width) and scanning length (width) were acquired and stored in a database. Subsequently, these data were utilized to compensate the scanning path of the laser beam. In addition, experiments for determining the layer thickness in the z-direction were performed and these results were also used in the scanning path generation algorithm.
机译:自动化扫描路径生成过程以有效实现微立体光刻至关重要。但是,仅基于3D CAD模型生成的扫描路径会导致尺寸不正确。在微立体光刻法中,光聚合物的固化受制造条件的影响,例如光聚合物的光学性质(激光功率,激光扫描速度,激光扫描间距聚焦条件等)和材料性质。因此,在产生激光扫描路径时必须考虑光聚合物固化现象。本文提出了一种使用3D CAD数据并考虑光聚合物固化现象的扫描路径生成算法,以提高微立体光刻的尺寸精度。在各种激光扫描条件下进行了多线光聚合物固化实验,以检查光聚合物固化现象。从这些实验中,获得固化长度(宽度)和扫描长度(宽度)之间的线性关系,并将其存储在数据库中。随后,这些数据被用来补偿激光束的扫描路径。另外,进行了用于确定z方向上的层厚度的实验,并且这些结果也被用于扫描路径生成算法中。

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