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PECVD Coatings for Magnesium Casting Protection

机译:用于镁铸造保护的PECVD涂层

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In this study SiO_2-like films have been deposited by Plasma Enhanced Chemical Vapour Deposition (PECVD) on Mg alloys employed in the automotive industry in different experimental conditions in order to optimize the protective effectiveness of the deposited layers. The experimental apparatus used was a capacitive coupled (CC) parallel-plate-reactor with an asymmetric electrode configuration, the electromagnetic radiation was applied to a gas mixture containing tetraetoxysilane (TEOS), oxygen and argon in different ratios. The deposition was performed at 100 mTorr of pressure, by varying the input power, on as cast and polished samples submitted to a pre-treatment step in H_2-containing plasma. A set of Mg alloy specimens has been treated with a standard anodising process (AP). From the overall experimental results, PECVD appears an attractive surface modification technique which allows, through the deposition of SiO_2-like films, to increase the corrosion resistance of Mg alloys, usually protected with anodising treatment or with chromium-based coatings. The check of the transfer ability of deposition process to a medium scale range is now running. Magnesium frames representative of real automotive parts coated in a PECVD industrial chamber, assembled and painted are submitted to accelerated corrosion test in order to verify the corrosion resistance of these painted elements manufactured following the production steps of a real component.
机译:在这项研究中,已通过等离子增强化学气相沉积(PECVD)在不同实验条件下在汽车工业中使用的Mg合金上沉积了类SiO_2薄膜,以优化沉积层的保护效果。所使用的实验设备是具有不对称电极配置的电容耦合(CC)平行板反应器,将电磁辐射应用于包含不同比例的四乙氧基硅烷(TEOS),氧气和氩气的气体混合物。通过改变输入功率,在100 mTorr的压力下进行沉积,将铸件和抛光后的样品送入含H_2的等离子体中进行预处理。一组镁合金试样已通过标准阳极氧化工艺(AP)处理。从整体实验结果来看,PECVD似乎是一种有吸引力的表面改性技术,该技术可通过沉积SiO_2状薄膜来提高通常通过阳极氧化处理或铬基涂层保护的Mg合金的耐蚀性。现在正在检查沉积过程到中等规模范围的转移能力。代表在PECVD工业厂房中涂覆,组装和喷涂的真实汽车零件的镁框架经受加速腐蚀测试,以验证按照真实组件的生产步骤制造的这些喷涂元件的耐腐蚀性。

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