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首页> 外文期刊>Materials science in semiconductor processing >A compare of electrical characteristics in Al/p-Si (MS) and Al/C20H12/p-Si (MPS) type diodes using current-voltage (I-V) and capacitance-voltage (C-V) measurements
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A compare of electrical characteristics in Al/p-Si (MS) and Al/C20H12/p-Si (MPS) type diodes using current-voltage (I-V) and capacitance-voltage (C-V) measurements

机译:使用电流-电压(I-V)和电容-电压(C-V)测量结果比较Al / p-Si(MS)和Al / C20H12 / p-Si(MPS)型二极管的电特性

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In this study, both the metal-semiconductor (MS) and metal-polymer-semiconductor (MPS), (Al/C20H12/P-Si), type Schottky barrier diodes (SBDs) were fabricated using spin coating method and they were called as D-1 and D-2 diodes, respectively. Their electrical characterization have been investigated and compared using the forward and reverse bias I-V and C-V measurements at room temperature. The main electrical parameters such as ideality factor (n), reverse saturation current (I-o), zero-bias barrier height (Phi(Bo)), series (R-s) and shunt (R-sh) resistances, energy dependent profile of interface states (N-ss), the doping concentration of acceptor atoms (N-A) and depletion layer width (W-D) were determined and compared each other and literature. The rectifying ratio (RR) and leakage current (I-R) at +/- 3 V were found as 2.06 x 10(3), 1.61 x 10(-6)A and 15.7 x 10(3), 2.75 x 10(-7) A for D-1 and D-2, respectively. Similarly, the R-s and R-sh values of these diodes were found as 544 Omega, 10.7 M Omega and 716 Omega and 1.83 M Omega using Ohm's Law, respectively. In addition, energy and voltage dependent profiles of N55 were obtained using the forward bias I-V data by taking into account voltage dependent effective barrier height (Phi(e)) and n and low-high frequency capacitance (C-LF-C-HF) methods, respectively. The obtained value of N-ss for D-2 (MPS) diode at about the mid-gap of Si is about two times lower than D1 (MS) type diode. Experimental results confirmed that the performance in MPS type SBD is considerably high according to MS diode in the respect of lower values of N-ss, R-s and I-o and higher values of RR and R-sh. (C) 2015 Elsevier Ltd. All rights reserved.
机译:在这项研究中,使用旋涂法制造了金属半导体(MS)和金属聚合物半导体(MPS)(Al / C20H12 / P-Si)型肖特基势垒二极管(SBD)。 D-1和D-2二极管。已使用室温下的正向和反向偏置I-V和C-V测量结果对它们的电特性进行了研究和比较。主要电气参数,例如理想因子(n),反向饱和电流(Io),零偏置势垒高度(Phi(Bo)),串联电阻(Rs)和分流电阻(R-sh),界面状态的能量依赖性曲线测定(N-ss),受体原子的掺杂浓度(NA)和耗尽层宽度(WD),并与文献进行比较。 +/- 3 V时的整流比(RR)和泄漏电流(IR)为2.06 x 10(3),1.61 x 10(-6)A和15.7 x 10(3),2.75 x 10(-7) )分别代表D-1和D-2。同样,根据欧姆定律,这些二极管的R-s和R-sh值分别为544 Omega,10.7 M Omega和716 Omega和1.83 M Omega。此外,使用正向偏置IV数据,并考虑到电压相关的有效势垒高度(Phi(e))和n以及低频电容(C-LF-C-HF),可获得N55的能量和电压相关曲线方法。 D-2(MPS)二极管在Si的中间能隙处获得的N-ss值大约是D1(MS)型二极管的两倍。实验结果证实,相对于N-ss,R-s和I-o的较低值以及RR和R-sh的较高值,根据MS二极管,MPS型SBD的性能相当高。 (C)2015 Elsevier Ltd.保留所有权利。

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