Double-Coupled Dynamics for the Electromechanical Integrated Electrostatic Harmonic Drive

摘要

In this paper, considering bending vibration as a perturbation for extension vibration of the ring, the double-coupled dynamic equations of the electromechanical integrated electrostatic harmonic drive are presented. In the equations, electromechanical coupling and extension-bending coupling are included. Based on static displacements, dynamic electromechanical coupled forces are determined. Substituting the dynamic electromechanical coupled force into dynamic equations, and using the perturbation method, the natural frequencies and vibration modes of the drive system are investigated. Changes of the natural frequencies and mode functions along with drive parameters are presented. A number of useful results are obtained. Compared with single-extension vibration, natural frequencies of the coupled extension-bending vibrations increase, and their mode function magnitudes change as well. The natural frequency and vibrating magnitudes of the double-coupled drive system are affected by mechanical and electric parameters such as ring radius, clearance, relative dielectric constant, width of the insulating layer, and so on, among which ring radius and clearance have more obvious influence.