机译:从扫描电容显微镜数据确定半导体中掺杂剂分布的回归程序
Sparse linear-equations; Least-squares; Simulation; Algorithm; Needs; Lsqr;
机译:Dopant profiling on semiconducting sample by scanning capacitance force microscopy
机译:Lateral dopant profiling with 200 nm resolution by scanning capacitance microscopy
机译:Dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation