Magnetic properties of the sendust/Ta2O5multilayer thin films

摘要

The Sendust multilayer thin films were fabricated to improve magnetic properties by rf magnetron sputtering. The effective permeability of the film with 50 Aring; of a Ta2O5middle layer was 1800 when annealed at 500deg;thinsp;C. The coercivity of the film was 0.5 Oe. When the middlehyphen;layer thickness was thicker than 100 Aring;, the result showed no magnetic improvement in permeability and coercivity.