Novel Structured Multilayer Piezoelectric PZT Micro-Actuators using Screen Printing Technology

摘要

A novel structure for multilayer piezoelectric PZTactuator combining the merits of high displacement/voltagesensitivity, high resonance frequency and low cost is designed. Thescreen printing technology is adopted to fabricate this newlydesigned actuator successfully. Such an actuator comprisesalternatively a plurality of PZT layers and a plurality of Pd-Agelectrode layers. Under the driving voltage of 10v, a displacementvalue of 1.57 #mu#m is obtained, and the correspondingresonance frequency is 56.9kHz. only a few layers are required toconstruct this multilayer actuator, instead of tens or even hundredsof layers required by a conventional stacked multilayer actuator torealize a large displacement, thus the manufacturing cost can begreatly reduced.