Encapsulating the electroluminescent phosphor micro-particles using a pulsed metal-organic chemical vapor deposition process in a fluidized bed

摘要

The protective coating efficiency of illuminated phosphor micro-particles has been investigated. The coating was performed by a pulsed feeding metal-organic chemical vapor deposition (MOCVD) in a fluidized bed using aluminum tri-sec-butylate or aluminum isopropoxide as a precursor. This pulsed MOCVD process in a fluidized bed shows excellent performance for encapsulating micro-particles. The pulsed feeding and the fluidization minimize the agglomeration between the phosphor micro-particles during the MOCVD process. Coating thickness is also precisely controlled up to the range of a few angstroms in thickness. Furthermore, by feeding the explosive aluminum MO precursor separately with oxygen gas, the coating process has been performed more safely in the pulsed MOCVD process. (C) 2002 Elsevier Science B.V. All rights reserved. References: 7