A Study on Static Analysis of MEMS Devices on Pull-in Parameter Calculations for Analog and Digital Mode Actuation

摘要

Pull-in study of an electrostatic microactuator is essential for making the electrostatic actuation more effective. Electrostatically actuated Microelectromechanical systems (MEMS) of torsional actuators are modeled for analog and digital application. In this paper the electromechanical behavior of a torsional micromirror is modeled from a static analysis. Pull-in parameters are crucial limiting factors on deciding whether the particular MEMS device is to be actuated in digital or analog mode. Pull-in voltage is taken as the main parameter for this static analysis and the pull-in calculations are done by using normalized equations. Increasing or decreasing of pull-in angle limit which is an important functional aspect in fixing the application requirement of the analogue/digital mode actuation. The pull-in voltage and pull-in angle could be tailored for these applications by torsional stiffness of values hinge. In this modeling, the hinge stiffness is taken as tuning parameter for the pull-in voltage.