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Grinding Damage of BK7 using Copper-Resin Bond Coarse-Grained Diamond Wheel

机译:铜-树脂结合剂粗磨金刚石砂轮对BK7的磨削损伤

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摘要

Coarse-grained wheels can realize high efficient grinding of optical glass. However, the serious surface and subsurface damage will be inevitably introduced by the coarse-grained wheels. In this paper, the grinding damage of a copper-resin bond coarse-grained diamond wheel with grain size of 150μm was investigated on optical glass BK7. The wheel was first properly trued with a metal bond diamond wheel, then pre-dressing for the wheel and grinding experiments are carried out on a precision grinder assisted with electrolytic in process dressing (ELID) method. The surface roughness (Ra) of ground surface was measured using an atomic force microscope (AFM) and the surface topography were imaged by a white light interferometer (WLI) and the AFM. The subsurface damage level of ground surface was evaluated by means of both MRF spot method and taper polishing-etching method, in term of the biggest depth of subsurface damage, distribution of micro defects beneath the ground surface, the cluster depth of subsurface damage, relationship between subsurface damage (SSD) and PV surface roughness (SR), propagating distance and pattern of cracks beneath the ground surface. Experimental results indicate that a well conditioned copper-resin bond coarse-grained diamond wheel on a precision grinder can generate good surface quality of Ra less than 50nm and good subsurface integrity with SSD depth less than 3 5μm for optical glass BK7.
机译:粗粒砂轮可以实现光学玻璃的高效研磨。但是,粗糙的砂轮不可避免地会造成严重的表面和表面损伤。本文研究了光学玻璃BK7对150μm粒度的铜-树脂结合剂粗晶粒金刚石砂轮的磨削损伤。首先使用金属结合剂金刚石砂轮对砂轮进行适当修整,然后对砂轮进行预修整,并在精密磨床上辅以电解过程修整(ELID)方法进行磨削实验。使用原子力显微镜(AFM)测量地面的表面粗糙度(Ra),并通过白光干涉仪(WLI)和AFM对表面形貌成像。利用MRF斑点法和锥度抛光-刻蚀法对地表下的破坏程度进行了评估,从地下破坏的最大深度,地下微观缺陷的分布,地下破坏的簇状深度,关系等方面进行了评价。在地下破坏(SSD)和PV表面粗糙度(SR)之间,传播距离和地面以下裂缝的形式之间进行比较。实验结果表明,在精密研磨机上,条件良好的铜-树脂结合的粗晶粒金刚石砂轮可以为光学玻璃BK7产生良好的Ra小于50nm的表面质量和良好的表面完整性,且SSD深度小于35μm。

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