A study of the effects of polishing parameters on material removal rate and non-uniformity

摘要

In this paper, experiments are conducted to reveal the effects of polishing parameters such as rotational speed, applied pressure, locations of nozzles for slurry, and flow rate of flurry on surface characteristics when polishing an aluminum based rigid disk. A double-sided polishing machine is used in these experiments and an inner pin ring is held still during the process, so that the removal rates of disks at different locations are different. It was shown that the removal rate for outer disks is less than that for inner disks. This phenomenon is in contrast to that predicted using the popular Preston equation. Although it was shown that the removal rate increases as the relative velocity or the applied pressure increases, it is not proportional to either the applied pressure or the relative speed as described by the Preston equation.