...
机译:Comparison of MOCVD- and ALD-Deposited formula formulatype="inline"tex Notation="TeX"$ hbox{HfZrO}_{4}$/tex/formula Gate Dielectrics for 32-nm High-Performance Logic SOI CMOS Technologies
Atomic layer deposition (ALD); SOI; high-$k$ (HK) gate dielectrics; high-performance logic; metal–organic chemical vapor deposition (MOCVD);