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机译:Self-Aligned Top-Gate Coplanar a-Si:H Thin-Film Transistors With a –Silicone Hybrid Gate Dielectric
Department of Electrical Engineering and the Princeton Institute for the Science and Technology of Materials, Princeton University, Princeton, NJ, USA;
$hbox{SiO}_{2}$–silicone hybrid; Amorphous silicon (a-Si:H); coplanar top-gate thin-film transistor (TFT); plasma-enhanced chemical vapor deposition (PE-CVD);