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机译:4H SiC epitaxial growth with chlorine addition
CNR, IMM, Sez Catania, I-95121 Catania, Italy;
Catania Univ, Dept Phys, I-95123 Catania, Italy;
BIC Sicilia, Epitaxial Technol Ctr, I-95030 Catania, ItalyPolitecn Milan, Chem Mat & Chem Engn Dept, I-20133 Milan, ItalyLPE, I-20021 Bollate, MI, Italysg.ki.ku.dk;
epitaxial growth; 4H SiC; HCl; Schottky diodes; high-power devices; SILICON; DIODES; CVD;