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Production of Carbon Nanostructures under Stationary Quasi-Equilibrium Condensation during Magnetron Sputtering

机译:磁控溅射过程中稳态准平衡缩合下碳纳米结构的产生

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摘要

The results of studying the evolution of structural and morphological characteristics of carbon condensates in the process of their growth using a plasma - condensate accumulation system are presented. This system allows the technological process to be conducted at low (<0.1) relative supersaturations of condensing vapors. As was shown in electron-microscopy studies, weakly bound graphite-like amorphous structures are formed at the initial condensate-formation stage. The further growth of the condensate leads to the formation of a growth surface with dome-shaped protrusions on which nanoscale fibers subsequently nucleate. At the final stage of the condensate growth, new spheres arise on the fiber surfaces, thus leading to appreciable thickening and merging of fibers and formation of layers with a developed surface.
机译:提出了使用等离子-冷凝水累积系统研究碳冷凝水在其生长过程中的结构和形态特征演变的结果。该系统允许工艺过程在冷凝蒸汽的相对过饱和度低(<0.1)的情况下进行。如电子显微镜研究所示,在初始冷凝物形成阶段形成了弱结合的石墨状无定形结构。冷凝物的进一步生长导致形成具有圆顶状突起的生长表面,纳米级纤维随后在其上成核。在凝结水增长的最后阶段,纤维表面会出现新的球体,从而导致纤维明显增稠和融合,并形成表面发达的层。

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