An image sensor based on demodulation using modulated illumination

摘要

We have proposed an image sensor for detecting modulation light. A pixel circuit TEG has been fabricated using 0.35μm CMOS process. A photogate is used for the photodetector. We have experimentally confirmed the demodulation output for the modulated illumination of 5kHz under the background of 100μW/cm{sup}2. It is found that the n-diff regions in the both side of the photogate acts as a pocket of charge and affects the demodulation performance.