Research Reviews and Prospects of Micro Transmission Mechanism

摘要

With the rapid development of MEMS fabrication technology, the function of transferring motion and force for micro transmission meclianism has been basically implemented. The micro transmission mechanism could mainly be driven by micro actuators, through several transmission parts such as micro link, micro hinge and micro gear, to transfer motion and force. Research status and working principle of micro transmission mechanism in the recent twenty years are summarized in detail. Research status and research achievements about design and transferring motion are introduced. In addition, the key technology, existing problems and application prospect of micro transmission mechanism are analyzed.