Nitride nanostructured coatings, which are based on high entropy alloys implanted with high doses of N + ions to 10×18 cm~2 with an energy of 60 KeV were investigated. The coatings were deposited by vacuum circuit-arc method of cathode evaporation on steel samples when applying different potential on the steel substrate and the residual pressure in the chamber. The chamber was supplied by molecular nitrogen for nitride formation. Several methods such as SIMS, EDS, and XRD were used for elemental composition analysis of the coating. A scanning electron microscope with energy dispersive spectrometry was used in order to study the surface of the multi-component coatings and their elemental composition and distribution of elements on the surface coating. Nanohardness and elastic modulus were studies in dynamic mode at Triboindentor. Introduction of N atoms into the lattice led to the formation of solid solution. Nanostructured coatings obtained by vacuum-arc deposition with high micro-strain action show high hardness values (up to 32 GPa) due to the difference in atomic radius of the crystal lattices metal components. The coefficient of friction was in the range of 0.18 to 0.25. Deposited nanostructured films with the given mechanical properties may be used for wear resistant or protective coatings.
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