Logic design for printability using OPC methods

摘要

abstract_textpThis article provides an intriguing analysis of traditional DFM techniques and describes methods of extending them into post-tapeout optimization in the form of OPC or RET design for printability. Layouts are altered so that lithographic patterning control improves. A highlight of the article is its subsequent analysis of the implementation feasibility of actual product designs.This article provides an intriguing analysis of traditional DFM techniques and describes methods of extending them into post-tapeout optimization in the form of OPC or RET design for printability. Layouts are altered so that lithographic patterning control improves. A highlight of the article is its subsequent analysis of the implementation feasibility of actual product designs./p/abstract_text