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机译:An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study
Christian Doppler Lab for Artificial Intelligence in Retina, Medical University of Vienna, Vienna, Austria;
Kompetenzzentrum Automobil- und Industrieelektronik GmbH, Villach, Austria;
University of Padova, Padua, Italy;
Feature extraction; Convolution; Production; Semiconductor device manufacture; Task analysis; Fault detection; Decoding;