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机译:Improvement of Virtual Diagnostics Performance for Plasma Density in Semiconductor Etch Equipment Using Variational Auto-Encoder
Functional Materials and Components Research and Development Group, Gangwon Division, Korea Institute of Industrial Technology, Gangneung, South Korea;
Etch Equipment Development Group, SEMES, Cheonan, South Korea;
School of Electrical Engineering and Computer Science, AI Graduate School, Gwangju Institute of Science and Technology, Gwangju, South Korea;
Plasmas; Data models; Feature extraction; Plasma density; Semiconductor device modeling; Predictive models; Convolutional neural networks;