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机译:A One-Shot Learning Approach for Similarity Retrieval of Wafer Bin Maps With Unknown Failure Pattern
Zhejiang Univ, Coll Control Sci & Engn, Hangzhou 310027, Peoples R China;
Zhejiang Univ, Coll Control Sci & Engn, Hangzhou 310027, Peoples R China|Zhejiang Univ, State Key Lab Ind Control Technol, Hangzhou 310027, Peoples R China;
Feature extraction; Training; Semiconductor device modeling; Morphology; Convolutional neural networks; Generators; Deep learning; Wafer map retrieval; one-shot learning; unknown pattern detection; deep learning; semiconductor manufacturing;