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机译:An Improved Capsule Network (WaferCaps) for Wafer Bin Map Classification Based on DCGAN Data Upsampling
Brunel Univ London, Dept Elect & Comp Engn, Uxbridge UB8 3PH, Middx, England;
Training; Generators; Feature extraction; Deep learning; Clustering algorithms; Support vector machines; Semiconductor device modeling; Capsule network; data augmentation; deep learning; defect detection; generative adversarial network (GAN); pattern recognition; semiconductor manufacturing; wafer bin map (WBM);