机译:一种用于可解释多晶圆仓图分类的分层空间测试注意力网络
Korea Univ, Sch Ind & Management Engn, Seoul 02841, South Korea;
Semiconductor device modeling; Machine learning; Feature extraction; Convolutional neural networks; Task analysis; Context modeling; Manufacturing; Multiple wafer bin maps classification; semiconductor manufacturing; deep learning; explainable neural network; attention mechanism;