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机译:A Real-Time Monitoring Framework for Wafer Fabrication Processes With Run-to-Run Variations
Zhejiang Univ, Coll Control Sci & Engn, Hangzhou 310027, Zhejiang, Peoples R China;
Fabrication; Trajectory; Real-time systems; Process control; Principal component analysis; Semiconductor device modeling; Process monitoring; uneven duration; run-to-run drift; multiway principal component analysis; wafer fabrication;