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机译:Semiconductor Defect Pattern Classification by Self-Proliferation-and-Attention Neural Network
Natl Tsing Hua Univ, Int Intercollegiate PhD Program, Hsinchu 300044, Taiwan;
Natl Tsing Hua Univ, Elect Engn Dept, Hsinchu 300044, Taiwan;
Convolution; Feature extraction; Computer architecture; Task analysis; Costs; Neural networks; DNA; Convolutional neural network; defect inspection;