首页> 外文期刊>Journal of vacuum science and technology, B. Nanotechnology & microelectronics: materials, processing, measurement, & phenomena: =JVST B >Innovations in the vapor deposition of metal coatings for target payloads in laser-based physics experiments under extreme conditions
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Innovations in the vapor deposition of metal coatings for target payloads in laser-based physics experiments under extreme conditions

机译:创新的汽相淀积金属涂料在激光目标的有效载荷在极端条件下物理实验

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摘要

The synthesis of metal foils with unique surface features such as waves and steps is of interest for use as payloads in targets for laser-driven physics experiments under dynamic loading conditions. Changes to the surface features are used to quantify the effects of the material strength during the deformation at high-strain rate high pressure. A traditional path to produce these target features is by precision machining processes using diamond tools. Limitations are encountered since many of the materials of interest and the size of the surface features are not often compatible with conventional machining-process methods. An alternative method to produce targets with unique surface features is through vapor synthesis. Two general approaches are taken-one is by replicating the features from the surface of a substrate mandrel, whereas the second is by using hard masks with timed exposure to the deposition vapor. In these approaches, postdeposition removal of a release layer yields a free-standing target with the desired surface features. Specific cases are presented for the physical vapor deposition of copper, aluminum, iron, vanadium, and tantalum to form targets with multiple layers, steps, and sinusoidal surface waves.
机译:金属箔的合成具有独特的表面感兴趣的特性,比如波和步骤用作laser-driven目标的有效载荷物理实验在动态加载条件。用来量化的影响材料强度在高应变的变形率高的压力。这些目标特性是通过精密机械加工流程使用金刚石工具。遇到因为很多的材料兴趣和表面特性的大小不常与传统兼容加工过程的方法。生产目标具有独特的表面特性是通过蒸汽合成。方法是迈出了一是复制的从衬底芯棒表面的特性,而第二个是通过使用坚硬的面具时间暴露在沉积蒸汽。方法,postdeposition取消发布层的独立的目标收益率需要的表面特征。物理气相沉积的铜、铝、铁、钒、钽形式与多层目标,步骤,正弦表面波。

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