机译:使用SIBN和SIBON电影由等离子体从硼吖嗪增强化学汽相淀积随着互连电介质
IBM CORP DIV RES TJ WATSON RES CTR YORKTOWN HTS NY 10598 USA;
Silicon; Copper; nitrogen oxidesborazinePlasmasbarriersMetalationconformalityFilmsChemical vapor depositionvapour depositionsilicon dioxideBlood plasmaDielectricsPLASMA;
机译:a novel approach to Co/CNTs catalyst via chemical vapor deposition of organometallic compounds