机译:氮化硅薄膜沉积电子束蒸发MBE射频等离子体系统
U.S. Naval Research Laboratory, Electronics Science and Technology Division, 4555 Overlook Avenue, S.W., Washington, DC 20375-5347;
American Society for Engineering Education, 1818 N Street, NW, Suite 600, Washington, DC 20036;
silicon nitrides; radiofrequency; plasma sourcestantalum nitride filmelectron beamMolecular beam epitaxyEffusionElectron beam evaporation;
机译:真空蒸镀Nd:YAG薄膜的工艺研究 Study on the Process of Nd:Y3Al5O12 Thin Films by Evaporation Deposition
机译:Evaluation of Temperature and Germanium Concentration Dependence of EXAFS Oscillations in Si-Rich Silicon Germanium Thin Films
机译:Effects of Hydrogen plasma on the Electrical properties of F-Doped ZnO Thin Films and p-i-n -si:H Thin Film solar Cells
机译:Rf-sputtered Tetragonal Titium Titanate Films on silicon