机译:Nano-Porosity等离子增强化学的作用汽相淀积的气密性能a-SiOCN: H介质阻挡材料
Logic Technology Development, Intel Corporation, Hillsboro, Oregon 97124, USA;
Pore size; zinc oxide eugenol; Barrier materialsPlasma enhanced chemical vapor depositionDielectricsMASS DENSITYEquivalent;
机译:介质阻挡放电等离子体技术的研究进展Review on Dielectric Barrier Discharge Plasma Technology