Optical and XRF Imaging and Analysis

摘要

Horiba Scientific has released the XGT-9000 X-ray analytical microscope(pXRF),which simultaneously performs elemental analysis and optical observation of samples.Incorporating Horiba's proprietary X-ray technology,the XGT-9000 not only screens foreign objects in a range of production processes,including semiconductor integrated circuits,it also measures film thickness and adherence amounts with a high degree of accuracy.By integrating the features of a high-resolution microscope and high-intensity X-ray beams,the XGT-9000 performs non-destructive foreign-object analysis on samples,switching between high-speed analysis mode for rapid screening of foreign objects,and detailed analysis mode using the micro beams first incorporated in earlier models.