Multiphysics Analysis for Micro Electromechanical Systems Based on Electrical Circuit Simulator

摘要

We report a newly developed equivalent electrical circuit for microelectromechanical systems (MEMS) based on a circuit simulator Qucs (Quite Universal Circuit Simulator). An analog computing solver for the equation of motion (EOM) has been interpreted to an electrical equivalent circuit by using an electrical capacitor as an ideal mathematic integrator. Viscoelastic suspension and electrostatic parallel-plate actuator are modeled as equivalent subcircuits that can be cosolved with the EOM module. Those subcircuit models are used as building blocks to numerically simulate the behavior of various types of MEMS actuators. Thanks to the well-prepared simulation toolbox of Qucs, multiphysics analysis of micromechanical and electrical quantities has become straightforward on a single platform. Equivalent circuit models for coupled oscillator and parallel-plate electrostatic actuator (including mechanical contact after electrostatic pull-in) are presented as a verification program to examine the simulation accuracy.