A simulation on neutralization performance of a corona discharge air ionizer by using an equivalent circuit

摘要

Corona‐discharge air ionizers have been used to neutralize static electricity on electronic devices during manufacturing and/or inspection processes. The neutralization performance, that is, the neutralizing current density ( J W ) and the electric field ( E W ), in work area depends on the operating conditions. Methods for estimating the neutralization performance are required to check them without stopping the production lines. In this paper, we propose an estimation method using an equivalent circuit simulation called the Simulation Program with Integrated Circuit Emphasis (SPICE) for estimating the behavior of positive and negative ions in the generation, transportation, and work areas. In the simulation, the ion generation characteristics are simulated by diodes and resistors. The transportation and accumulation of the ions are simulated by resistors and capacitors, respectively. The annihilation of ions by recombination is simulated by a circuit composed of capacitors and resistors. The simulation results are in good agreement with the experimental results when the distance between the emitter of the air ionizer and the work area is varied. ? 2019 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.